A multiphysics model for optimizing the design of active aerostatic thrust bearings

Precision Engineering

Volumn 34, Issue 3, 2010, Pages 507-515

  Aguirre, Gorka ^a   Al Bender, Farid ^a   Van Brussel, Hendrik ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Active air bearing; Active control; Dynamic stiffness compensation; Multiphysics model; Nanometer position control

Indexed keywords

ACTIVE COMPENSATION; ACTIVE CONTROL; AEROSTATIC BEARINGS; AEROSTATIC THRUST BEARING; AIR BEARING; AIR FLOW; AIR-GAPS; COUPLED FORMULATION; DESIGN STRATEGIES; DISTURBANCE COMPENSATION; DISTURBANCE FORCE; DYNAMIC STIFFNESS COMPENSATION; FINITE ELEMENT MODELS; HIGH BANDWIDTH; HIGH PRECISION; INERTIAL EFFECT; MACHINING FORCE; MULTI-PHYSICS; MULTIPHYSICS MODEL; NANOMETRES; SHAPE CONTROL; STRUCTURAL FLEXIBILITIES;

AERODYNAMICS; AIR; CONTROL SYSTEM ANALYSIS; CRYSTALLOGRAPHY; DESIGN; FINITE ELEMENT METHOD; FLUID STRUCTURE INTERACTION; INDUSTRIAL APPLICATIONS; OPTIMIZATION; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; STIFFNESS; THRUST BEARINGS;

POSITION CONTROL;

EID: 77951296142     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2010.01.004     Document Type: Article

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