Development of an active aerostatic slide with submicrometer precision in six degrees of freedom

Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009

Volumn 1, Issue , 2009, Pages 316-319

  Aguirre, G ^a   Al Bender, F ^a   Van Brussel, H ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

AERODYNAMICS; BEARINGS (MACHINE PARTS); DEGREES OF FREEDOM (MECHANICS); ELECTRIC ARC WELDING; MECHANICS;

AEROSTATIC BEARINGS; CARRIAGE STRUCTURES; DESIGN CHALLENGES; DYNAMIC DISTURBANCES; LINEAR SLIDE; SIX DEGREES OF FREEDOM; STRAIGHTNESS ERRORS; SUBMICROMETERS;

PRECISION ENGINEERING;

EID: 77951294507     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. C. H. Park et al., "Compensation for five DOF motion errors of hydrostatic feed table by utilizing actively controlled capillaries", Precision Engineering, Vol 30, 2006, pp. 299-305
2. F. Al-Bender, "On the modelling of the dynamic characteristics of aerostatic bearing films: from stability analysis to active compensation," Precision Engineering, Vol. 33 (2), 2009, pp. 117-126.
3. G. Aguirre, F. Al-Bender, H. Van Brussel, "A multiphysics coupled model for active aerostatic bearings", IEEE/ASME Conference on Advanced Intelligent Mechatronics, 2008, Xi'an, China, pp. 710-715