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Volumn , Issue , 2009, Pages 1832-1835
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Novel structure and fabrication of an energy harvesting device based on vibration-oriented generation for low oscillation operation
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Author keywords
[No Author keywords available]
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Indexed keywords
ENERGY HARVESTING DEVICE;
FABRICATION METHOD;
HYBRID SILICON;
LOW FREQUENCY;
LOW YOUNG'S MODULUS;
MICRO DEVICES;
MICRO ENERGY;
MICRO-CANTILEVERS;
NOVEL STRUCTURES;
OSCILLATION FREQUENCY;
RESONANT FREQUENCIES;
SCALING-UP;
SI MICROMACHINING;
HARVESTING;
NATURAL FREQUENCIES;
SENSORS;
ENERGY HARVESTING;
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EID: 77951105514
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ICSENS.2009.5398426 Document Type: Conference Paper |
Times cited : (1)
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References (7)
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