An auto-focusing method for imaging ellipsometry system

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 5, Issue 5, 2008, Pages 1046-1049

  Meng, Y H ^a,b   Chen, S ^a,b   Jin, G ^a  

^a INSTITUTE OF MECHANICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AUTO-FOCUSING; IMAGE BRIGHTNESS; IMAGE PLANE; IMAGING ELLIPSOMETRY; IMAGING SENSORS; OPTICAL AXIS; SHARPNESS FUNCTION;

SPECTROSCOPIC ELLIPSOMETRY;

LIGHT MEASUREMENT;

EID: 77951104521     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200777781     Document Type: Conference Paper

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