Study on the autofocus evaluation function in ellipsometric imaging system

Guangxue Xuebao/Acta Optica Sinica

Volumn 25, Issue 7, 2005, Pages 923-929

  Chen, She ^a   Meng, Yonghong ^a   Jin, Gang ^a  

^a INSTITUTE OF MECHANICS   (China)

Author keywords

Autofocus; Autofocus evaluation function; Ellipsometric imaging system; Microscopy; Noise; Optical measurement

Indexed keywords

ELLIPSOMETRY; EVALUATION; FUNCTIONS; IMAGING SYSTEMS; MICROSCOPIC EXAMINATION; PROTEINS;

AUTOFOCUS; ELLIPSOMETRIC IMAGING SYSTEM; EVALUATION FUNCTION; LAPLACIAN FUNCTION; OPTICAL MEASUREMENT; SOBEL FUNCTION;

FOCUSING;

EID: 23444460902     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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