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Volumn 1155, Issue , 2009, Pages 137-142

Thermal stability of GdScO3 dielectric films grown on Si and InAIN/GaN substrates

Author keywords

[No Author keywords available]

Indexed keywords

GRAZING INCIDENCE X-RAY DIFFRACTION; LIQUID INJECTIONS; METALORGANIC CHEMICAL VAPOR DEPOSITION; NITROGEN AMBIENT; RECRYSTALLIZATIONS; SI SUBSTRATES; THERMAL BUDGET; THERMAL STABILITY; THERMAL TREATMENT; TIME-OF-FLIGHT SECONDARY ION MASS SPECTROSCOPY; TOF SIMS; UPPER LIMITS; X RAY REFLECTIVITY;

EID: 77950977117     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (3)

References (6)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.