Nanomechanics of coatings for electronic and optical applications

Solid State Phenomena

Volumn 159, Issue , 2010, Pages 11-18

  Bull, S J ^a  

^a NEWCASTLE UNIVERSITY   (United Kingdom)

Author keywords

Coatings; Indentation models; Microelectronics devices; Multilayers; Nanomechanics

Indexed keywords

DESIGN; EXTRACTION; FILM PREPARATION; FILMS; FINITE ELEMENT METHOD; FRACTURE; FRACTURE TOUGHNESS; HARD COATINGS; MECHANICAL PROPERTIES; MECHANISMS; MICROELECTRONICS; MULTILAYERS; NANOINDENTATION; NANOMECHANICS; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; OPTICAL PROPERTIES; PLASTICITY; STRESSES; TENSILE STRAIN; THICKNESS MEASUREMENT; TITANIUM PLATING; YIELD STRESS; ADHESIVES; COATINGS; INDENTATION; STRAINED SILICON; SUBSTRATES;

ADHESIVE FAILURE; COATING APPLICATION; COATING LAYER; COATING PROPERTIES; COATING THICKNESS; COATING-SUBSTRATE SYSTEMS; COHESIVE ZONE MODEL; DAMAGE MECHANISM; DAMAGE RESISTANCE; DERIVED MATERIALS; DESIGN CALCULATIONS; DESIGN CRITERION; DEVICE SPEED; FINITE ELEMENT ANALYSIS; FRACTURE RESPONSE; FUNCTIONAL PROPERTIES; GEOMETRICAL NONLINEARITY; INDENTATION LOAD; INDENTATION MODELS; KEYPOINTS; MECHANICAL DESIGN; MECHANICAL RESPONSE; METALLIZATIONS; MICRO-ELECTRONIC DEVICES; MULTI-LAYER SYSTEM; MULTI-LAYER-COATING; NANOINDENTATION TESTING; NON-LINEAR; NONLINEAR ELASTICITY; OPTICAL APPLICATIONS; PLASTIC BEHAVIOR; STRESS FIELD; STRESS SENSOR; STRESS STIFFENING; THIN COATING; YIELD STRENGTH; COATING/SUBSTRATE SYSTEMS; GEOMETRICAL NON-LINEARITY;

MATERIALS PROPERTIES;

EID: 77950972430     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.159.11     Document Type: Conference Paper

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