The synthesization of Si nanocrystals embedded in HfO2 matrix by electron beam co-evaporation technique

ECS Transactions

Volumn 18, Issue 1 PART 2, 2009, Pages 1071-1074

  Li, Weilong ^a   Jia, Rui ^a   Chen, Chen ^a   Liu, Ming ^a   Li, Haofeng ^a   Zhu, Chenxin ^a   Long, Shibing ^a  

^a INSTITUTE OF MICROELECTRONICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENT SIZES; ELECTRON BEAM CO-EVAPORATION; ELECTRON BEAM EVAPORATION; MATRIX; MEAN DIAMETER; PHOTOLUMINESCENCE SPECTRUM; RAMAN SPECTRA; SI NANOCRYSTAL; SILICON NANOCRYSTALS; SYNTHESIZATION;

ANNEALING; ELECTRON BEAMS; ELECTRONS; EVAPORATION; HAFNIUM COMPOUNDS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; NANOCRYSTALLINE POWDERS; NANOCRYSTALS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR QUANTUM WELLS; SILICON; THIN FILMS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 77950673862     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3096574     Document Type: Conference Paper

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