Piezoresistive effect in SiOC ceramics for integrated pressure sensors

Journal of the American Ceramic Society

Volumn 93, Issue 4, 2010, Pages 920-924

  Riedel, Ralf ^a   Toma, Liviu ^a   Janssen, Enrico ^a   Nuffer, Jürgen ^b   Melz, Tobias ^b   Hanselka, Holger ^a,b  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b FRAUNHOFER INSTITUTE FOR STRUCTURAL DURABILITY AND SYSTEM RELIABILITY LBF   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON-BASED; FREE CARBON; INTEGRATED PRESSURE; K FACTOR; MATRIX; METHYLSILSESQUIOXANE; MICRO RAMAN SPECTROSCOPY; PERCOLATION EFFECTS; PIEZORESISTIVE EFFECTS; PIEZORESISTIVITY; POLYMER-TO-CERAMIC TRANSFORMATION; POLYSILOXANES; PYROLYSIS TEMPERATURE; SILICON OXYCARBIDES; STARTING MATERIALS; STRAIN SENSITIVITY; STRUCTURAL CHARACTERIZATION; X-RAY AMORPHOUS;

AMORPHOUS CARBON; PRESSURE EFFECTS; PYROLYSIS; RAMAN SPECTROSCOPY; SILICONES; SOLVENTS; X RAY DIFFRACTION;

CERAMIC MATERIALS;

EID: 77950493194     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2009.03496.x     Document Type: Article

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