Fabrication and characterization of AlN films containing various amounts of co content

Journal of Korean Institute of Metals and Materials

Volumn 48, Issue 3, 2010, Pages 268-275

  Bae, Chang Hwan ^a   Han, Seung Oh ^a   Han, Chang Suk ^a  

^a Hoseo University   (South Korea)

Author keywords

Magnetic properties; Microstructure; Plasma deposition; Thin films; X ray diffraction

Indexed keywords

EID: 77950432837     PISSN: 17388228     EISSN: None     Source Type: Journal    
DOI: 10.3365/KJMM.2010.48.03.268     Document Type: Article

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