Capacitive MEMS energy harvesters for structural monitoring: Design and fabrication

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 2009, Pages 211-214

  De Pasquale, Giorgio ^a   Wei, Mian ^b   Somà, Aurelio ^a   Wang, Jing ^b  

^a POLITECNICO DI TORINO   (Italy)

^b UNIVERSITY OF SOUTH FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT VIBRATIONS; CAPACITIVE TRANSDUCERS; DYNAMIC PERFORMANCE; ELECTROPLATED NICKEL; ENABLING TECHNOLOGIES; ENERGY HARVESTER; MODULAR DEVICE; POST-CMOS; RESONANCE FREQUENCIES; STRUCTURAL LAYERS; STRUCTURAL MONITORING; THERMAL BUDGET; VIBRATION ENERGIES;

FABRICATION; HARVESTERS; MEMS; MICROELECTROMECHANICAL DEVICES; NICKEL PLATING; RESONANCE;

STRUCTURAL HEALTH MONITORING;

EID: 77950163339     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMICND.2009.5336566     Document Type: Conference Paper

References (8)

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