A capacitively-loaded MEMS slot element for wireless temperature sensing of up to 300°C

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2009, Pages 1161-1164

  Scott, Sean ^a   Peroulis, Dimitrios ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

Capacitance; Harsh environment; Microelectromechanical devices; RFID sensing; Sensors; Wireless

Indexed keywords

A-PLANE; EMBEDDED TEMPERATURE SENSORS; FATIGUE PROBLEMS; HARSH ENVIRONMENT; MANUFACTURING YIELD; MEMS FABRICATION; RESONANT FREQUENCIES; RFID SENSING; TEMPERATURE SENSING;

ANTENNA ARRAYS; CAPACITANCE; INDOOR AIR POLLUTION; INSULATING MATERIALS; MEMS; MICROWAVE ANTENNAS; MICROWAVES; NANOCANTILEVERS; NATURAL FREQUENCIES; REMOTE SENSING; SLOT ANTENNAS; TEMPERATURE SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 77949976742     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2009.5165908     Document Type: Conference Paper

References (6)

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3. K. Topalli, E. Erdil, O. A. Civi, "Reconfigurable antenna structures using MEMS technology" www.ursi.org
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6. S. Scott, F. Sadeghi and D. Peroulis, "Inherently-robust 300C MEMS sensor for wireless health monitoring of ball and rolling element bearings," submitted to IEEE Transducers 2009 Conference, December 2008.