Challenges of complete CMOS/MEMS systems integration

NATO Science for Peace and Security Series B: Physics and Biophysics

Volumn , Issue , 2010, Pages 17-30

  Vaganov, Vladimir ^a  

^a Siantis Inc   (United States)

Author keywords

Accelerometer; CMOS MEMS integration; Inertial measurement unit; Micro structure; Multi sensor micro systems; Piezo transistor; Piezoresistor; Pressure sensor; Principle of multi axis measurements; Sensitive integrated circuits

Indexed keywords

EID: 77949452113     PISSN: 18746500     EISSN: None     Source Type: Book Series    
DOI: 10.1007/978-90-481-3807-4_2     Document Type: Article

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