The application of the continuous anodic oxidation technique for the evaluation of state-of-the-art front-end structures

AIP Conference Proceedings

Volumn 1066, Issue , 2008, Pages 75-78

  Prussin, S ^a   Qin, Shu ^b   Reyes, Jason ^a   Mcteer, Allen ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b MICRON TECHNOLOGY INC   (United States)

Author keywords

CAOT; Continuous anodic oxidation technique; Differential hall effect; Mobility; Plasma immersion ion implantation (PHI)

Indexed keywords

EID: 77949372701     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.3033687     Document Type: Conference Paper

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