The continuous anodic oxidation technique

AIP Conference Proceedings

Volumn 931, Issue , 2007, Pages 275-278

  Prussin, S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Anodic oxidation; Atomic layer resolution; Differential resistivity profiler; Polysilicon gate electrode; Ultra shallow junctions; Van der Pauw resistor

Indexed keywords

EID: 35348871246     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2799383     Document Type: Conference Paper

References (1)

1. N.G.E. Johansson, J.W. Mayer, O.J. Marsh. Solid State Electronics. 13 pg. 317 (1970)