Development of a laser-focused ion beam combination machine

Review of Scientific Instruments

Volumn 81, Issue 2, 2010, Pages

  Yoshida, Y ^a   Masuzawa, T ^b   Ikeda, H ^c   Oguchi, K ^c   Yamagishi, H ^c   Wakabayashi, Y ^c  

^a TOYO UNIVERSITY   (Japan)

^b Hiraide Precision Co Ltd   (Japan)

^c Nagano Prefecture General Industrial Technology Center   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPES; COMPOUND SYSTEM; FEMTO-SECOND LASER; GLASS-LIKE CARBON; MICRO-LENS ARRAYS; OPTICAL COMPONENTS; PRESS MOLDS; SUBMICROMETERS; ULTRAFINE;

PULSED LASER APPLICATIONS; SURFACE PROPERTIES; SURFACE ROUGHNESS; SURFACE STRUCTURE;

FOCUSED ION BEAMS;

CARBON;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; LASER; OPTICAL INSTRUMENTATION; SURFACE PROPERTY; TIME; ULTRAVIOLET RADIATION;

CARBON; LASERS; MICROSCOPY, ATOMIC FORCE; OPTICAL DEVICES; SURFACE PROPERTIES; TIME FACTORS; ULTRAVIOLET RAYS;

EID: 77949287413     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3258427     Document Type: Conference Paper

References (2)

1. M. Takahashi, K. Sugimoto, and R. Maeda, Jpn. J. Appl. Phys., Part 1 0021-4922 44, 5600 (2005). 10.1143/JJAP.44.5600 (Pubitemid 43182966)
2. T. Masuzawa, Y. Yoshida, H. Ikeda, K. Oguchi, H. Yamagishi, and Y. Wakabayashi, Rev. Sci. Instrum. 0034-6748 80, 073708 (2009). 10.1063/1.3186060