The model for oxidation kinetics of titanium nitride coatings

International Journal of Applied Ceramic Technology

Volumn 7, Issue 2, 2010, Pages 248-255

  Hou, Xinmei ^a   Chou, Kuo Chih ^a,b   Zhang, Mei ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

^b SHANGHAI UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION PROCESS; EXPERIMENTAL DATA; NEW MODEL; OXIDATION BEHAVIORS; OXIDATION KINETICS; OXIDATION PROCESS; PHYSICAL MEANINGS; RATE-CONTROLLING; TIN COATING; TITANIUM NITRIDE COATING;

COATINGS; OXIDATION; TITANIUM;

TITANIUM NITRIDE;

EID: 77649245672     PISSN: 1546542X     EISSN: 17447402     Source Type: Journal    
DOI: 10.1111/j.1744-7402.2008.02342.x     Document Type: Article

References (12)

1. Y. Sakka, S. Ohno M. Uda Oxidation and Degradation of Titanium Nitride Ultrafine Powders Exposed to Air J. Am. Ceram. Soc., 75 244 248 (1992).
2. P. J. Martin, R. P. Netterfield, W. G. Sainty C. G. Pacey The Preparation and Characterization of Optical Thin Films Produced by Ion-Assisted Deposition J. Vac. Sci. Technol. A, 2 341 345 (1984).
3. M. Wittmer High-Temperature Contact Structures for Silicon Semiconductor Devices Appl. Phys. Lett., 37 540 542 (1980).
4. M. Wittmer, J. Noser H. Mechior Oxidation Kinetics of TiN Thin Films J. Appl. Phys., 52 [11] 6659 6664 (1981).
5. I. G. Polyakova T. Hübert Thermal Stability of TiN Thin Film Investigated by DTG/DTA Surf. Coat. Technol., 141 55 61 (2001).
6. 3 Composite Coatings Thin Solid Film, 315 336 344 (1998).
7. N. B. Pilling R. E. Bedworth The Oxidation of Metals in High Temperature J. Inst. Met., 29 529 582 (1923).
8. C. Wagner On the Theory of Scaling Reactions Z. Phys. Chem. B, 21 25 42 (1933).
9. W. Jander Reactions in the Solid State at High Temperatures Z. Anorg. U. Allgem. Chem., 163 1 30 (1927).
10. K. C. Chou A Kinetic Model for Oxidation of Si-Al-O-N Materials J. Am. Ceram. Soc., 89 [5] 1568 1576 (2006).
11. K. C. Chou, Q. Li, Q. Lin, L. J. Jiang K. D. Xu Kinetics of Absorption and Desorption of Hydrogen in Alloy Powder Int. J. Hydrogen Energ., 30 301 309 (2005).
12. X. M. Hou K. C. Chou Comparison of the Diffusion Control Models for Isothermal Oxidation of Si-Al-O-N Powders J. Am. Ceram. Soc. 91 10 3315 3319 (2008).