High temperature LTCC package for SiC-based gas sensor

Optica Applicata

Volumn 39, Issue 4, 2009, Pages 701-704

  Nowak, Damian ^a   Kulczak, Dariusz ^a   Januszkiewicz, Maksymilian ^a   Dziedzic, Andrzej ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Low temperature co fired ceramics (LTCC); Packaging; Thick film

Indexed keywords

ELECTRICAL PARAMETER; ELECTRICAL SIGNAL; ELECTRONIC DEVICE; GAS SENSORS; HIGH TEMPERATURE; HYDROGEN GAS SENSORS; INTEGRATED HEATER; LOW TEMPERATURE CO-FIRED CERAMICS (LTCC); LOW-TEMPERATURE CO-FIRED CERAMICS; LTCC TECHNOLOGY; MECHANICAL DAMAGES; MULTILAYER STRUCTURES; OPTICAL SIGNALS; PACKAGE STRUCTURE; PACKAGING ISSUES; PACKAGING SYSTEM; PASSIVE COMPONENTS; SEMICONDUCTOR MICROELECTRONICS; THERMAL PROPERTIES; THICK-FILM TECHNOLOGY;

CERAMIC MATERIALS; GAS DETECTORS; MICROELECTRONICS; SENSORS; SILICON CARBIDE; THERMODYNAMIC PROPERTIES;

PACKAGING;

EID: 77449096564     PISSN: 00785466     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

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