Laser interferometric calibration for real-time video color interpretation of thin fluid layers during spin coating

Optics and Lasers in Engineering

Volumn 48, Issue 5, 2010, Pages 533-537

  Birnie III, Dunbar P ^a   Haas, Dylan E ^a   Hernandez, Carissa M ^a  

^a Piscataway   (United States)

Author keywords

Colorimetry; Interferometry; Spin coating; Thickness monitoring; Thin films

Indexed keywords

COLOR VIDEO; ENGINEERING PROCESS CONTROL; FLUID FLOWING; FLUID THICKNESS; ILLUMINATION CONDITIONS; INTERFERENCE EFFECTS; LASER INTERFEROMETRIC; REAL TIME VIDEOS; REFRACTIVE INDEX DISPERSION; SPIN DEPOSITIONS; THICKNESS MONITORING; THICKNESS PROFILES; THICKNESS VALUE; THIN FLUIDS; TIME-RESOLVED; TRANSPARENT FLUIDS; VISIBLE SPECTRA;

CALIBRATION; COATINGS; COLOR; COLORIMETERS; COLORIMETRY; INTERFEROMETERS; LASER INTERFEROMETRY; REFRACTIVE INDEX; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SPIN COATING; SPIN DYNAMICS; THIN FILMS;

FLUIDS;

EID: 77249136283     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2009.12.021     Document Type: Article

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