Optical 3D shape measurement for nano-scale thin film buckling

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7375, Issue , 2009, Pages

  Wang, S B ^a   Xiao, Y ^a   Jia, H K ^a   Li, L A ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

Focusing evaluation function; Nanometer scale; Out of plane displacement; Thin film buckling; Three dimension

Indexed keywords

3-D SHAPE; 3-D SHAPE MEASUREMENT; DIGITAL IMAGE; FILM MATERIALS; FOCUSING EVALUATION; FUNCTION THEORY; GAUSSIAN INTERPOLATION; HORIZONTAL DISPLACEMENTS; MICRO-MECHANICAL; NANO SCALE; NANO-METER SCALE; OPTICAL MICROSCOPES; OPTICAL WEDGES; ORGANIC GLASS; OUT-OF-PLANE DISPLACEMENT; VERTICAL DISPLACEMENTS;

BUCKLING; ERROR ANALYSIS; FOCUSING; FUNCTION EVALUATION; MECHANICS; NANOMECHANICS; NANOSTRUCTURED MATERIALS; STRESS ANALYSIS; THIN FILM DEVICES; THIN FILMS;

THREE DIMENSIONAL;

EID: 77049094916     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.839348     Document Type: Conference Paper

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