Micromachining of a newly designed AFM probe integrated with hollow microneedle for cellular function analysis

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1185-1189

  Kato, Norihisa ^a   Kawashima, Takahiro ^a   Shibata, Takayuki ^a   Mineta, Takashi ^b   Makino, Eiji ^b  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b HIROSAKI UNIVERSITY   (Japan)

Author keywords

Atomic force microscope (AFM); Cellular function analysis; Microelectro mechanical system (MEMS); Microneedles; Nanobiotechnology

Indexed keywords

AFM; AFM IMAGE; AFM PROBE; ATOMIC FORCE MICROSCOPES; BIOPROBE; CELLULAR FUNCTION; FABRICATION PROCESS; FLUIDIC MICROCHANNELS; LIVING CELL; MECHANICAL STRENGTH; MICROELECTROMECHANICAL SYSTEMS; MICRONEEDLES; SHARP TIP; SILICON DIOXIDE;

ATOMS; BIOMOLECULES; FABRICATION; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSCOPES; NEEDLES; PROBES; SILICA;

ATOMIC FORCE MICROSCOPY;

EID: 76949106929     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.12.025     Document Type: Article

References (14)

1. Clark N., Stokes K., and Mugabe J. Futures 34 (2002) 785-806
2. Lu X., Huang W.H., Wang Z.L., and Cheng J.K. Anal. Chim. Acta 510 (2004) 127-138
3. Pillarisetti A., Pekarev M., Brooks A.D., and Desai P. IEEE Trans. Autom. Sci. Eng. 4 (2007) 322-331
4. Ludwig M., Rief M., Schmidt L., Li H., Oesterhelt F., Gautel M., and Gaub H.E. Appl. Phys. A 68 (1999) 173-176
5. Radmacher M., Tillmann R.W., Fritz M., and Gaub H.E. Science 257 (1992) 1900-1905
6. Charras G.T., and Horton M.A. Biophys. J. 82 (2002) 2970-2981
7. Thalhammer S., and Heckl W.M. Nano. Today 8 (2005) 40-49
8. Butt H.-J., Cappella B., and Kappl M. Surf. Sci. Rep. 59 (2005) 1-152
9. Han S.W., Nakamura C., Obataya I., Nakamura N., and Miyake J. Biochem. Biophys. Res. Commun. 332 (2005) 633-639
10. Uehara H., Osada T., and Ikai A. Ultramicroscopy 100 (2004) 197-201
11. Kawashima T., Sakai T., Kato N., Shibata T., Nomura M., Mineta T., and Makino E. J. Micro/Nanolithogr. MEMS MOEMS 8 (2009) 033014
12. Sato K., and Uchikawa D. Sens. Mater. 13 5 (2001) 285-291
13. N. Kato, T. Sakai, T. Shibata, T. Kawashima, T. Mineta, E. Makino, Proceedings of the 9th International Euspen Conference. 2 (2009) 154-157.
14. N. Kato, T. Shibata, R. Oka, T. Sakai, T. Kawashima, M. Nomura, T. Mineta, E. Makino, Proceedings of the MicroTAS 2009 (2009) 716-718.