Integration of organic semiconductor lasers and single-mode passive waveguides into a PMMA substrate

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 693-695

  Vannahme, Christoph ^a   Klinkhammer, Sönke ^a   Kolew, Alexander ^a   Jakobs, Peter Jürgen ^a   Guttmann, Markus ^a   Dehm, Simone ^a   Lemmer, Uli ^a   Mappes, Timo ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Electron beam lithography; Lab on chip; Organic lasers; PMMA; Polymer replication; Waveguides

Indexed keywords

ACTIVE MATERIAL; BULK MATERIALS; CO-EVAPORATIONS; COUPLING REGION; DEEP ULTRAVIOLET; HOT-EMBOSSING; LAB-ON-CHIP; LAB-ON-CHIP SYSTEMS; LASER LIGHTS; LASER STRUCTURES; MICROFLUIDIC CHANNEL; MULTI-MODE WAVEGUIDES; ORGANIC LASER; ORGANIC SEMICONDUCTOR; ORGANIC SEMICONDUCTOR LASERS; OXIDIZED SILICON WAFERS; PASSIVE ELEMENTS; PASSIVE WAVEGUIDES; PLATING BASE; PMMA; POLYMER REPLICATION; SENSING APPLICATIONS; SINGLE MODE; SUBSTRATE STRUCTURE;

DISTRIBUTED FEEDBACK LASERS; ELECTROFORMING; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRONS; LASERS; LIGHT; PHOTONICS; REACTIVE ION ETCHING; SEMICONDUCTING ORGANIC COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR LASERS; SILICON OXIDES; SILICON WAFERS; SUBSTRATES; ULTRAVIOLET LASERS; WAVEGUIDES;

ORGANIC LASERS;

EID: 76949104691     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.12.077     Document Type: Article

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