Photonic integrated circuits by DUV-induced modification of polymers

IEEE Photonics Technology Letters

Volumn 17, Issue 3, 2005, Pages 591-593

  Rabus, Dominik G ^a   Henzi, Patric ^a   Mohr, Juergen ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Coupler; Deep ultraviolet (DUV); Multimode interference (MMI); Polymer; Y splitter

Indexed keywords

COMPUTER SIMULATION; INTEGRATED OPTICS; LIGHT INTERFERENCE; LIGHT POLARIZATION; LITHOGRAPHY; OPTICAL WAVEGUIDES; OPTIMIZATION; PHOTOLITHOGRAPHY; POLYMERS; REFRACTIVE INDEX;

COUPLER; DEEP ULTRAVIOLET (DUV) LITHOGRAPHY; MULTIMODE INTERFERENCE (MMI); PHOTONIC INTEGRATED CIRCUITS; Y-SPLITTER;

INTEGRATED OPTOELECTRONICS;

EID: 14844356545     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2004.840922     Document Type: Article

References (8)

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