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Volumn 5, Issue 5, 2009, Pages 383-386
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A new method for measuring laser beam straightness error based on common-path compensation
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Author keywords
[No Author keywords available]
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Indexed keywords
BASIC PRINCIPLES;
COMMON-PATH;
MEASUREMENT ACCURACY;
NOVEL METHODS;
STRAIGHTNESS ERRORS;
LASER BEAMS;
WAVEGUIDES;
ERROR COMPENSATION;
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EID: 76349099314
PISSN: 16731905
EISSN: None
Source Type: Journal
DOI: 10.1007/s11801-009-9013-y Document Type: Article |
Times cited : (8)
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References (8)
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