SCOPUS 정보 검색 플랫폼

Ferroelectrics

Volumn 362, Issue 1, 2008, Pages 30-40

Fabrication of high frequency bulk acoustic wave resonator using thinned single-crystal lithium niobate layers

(7) Gachon, D a Courjon, E a Martin, G a Gauthier Manuel, L a Jeannot, J C a Daniau, W a Ballandras, S a

a FEMTO ST INSTITUTE (France)

Author keywords

[No Author keywords available]

Indexed keywords

BULK ACOUSTIC WAVE RESONATOR; BULK ACOUSTIC WAVES; HIGH FREQUENCY; LITHIUM NIOBATE; PIEZOELECTRIC FILM; PLATE THICKNESS; RF FILTERS; SIGNAL PROCESSING DEVICES; SINGLE CRYSTAL WAFERS; THIN-FILM DEPOSITIONS; WAVE CHARACTERISTICS;

ACOUSTIC WAVES; ACOUSTICS; DEPOSITION; FERROELECTRIC FILMS; FERROELECTRIC THIN FILMS; FERROELECTRICITY; FILM THICKNESS; MOBILE TELECOMMUNICATION SYSTEMS; NIOBIUM COMPOUNDS; PIEZOELECTRICITY; SEMICONDUCTING SILICON COMPOUNDS; SIGNAL PROCESSING; SINGLE CRYSTALS; WAFER BONDING;

SILICON WAFERS;

EID: 76049098412 PISSN: 00150193 EISSN: 15635112 Source Type: Journal
DOI: 10.1080/00150190801997872 Document Type: Conference Paper

Times cited : (11)

References (7)

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2
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- Coussot, G.J.¹

3
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5
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- Evidence for complete surface wave band gap in a piezoelectric phononic crystal
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6
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.