High speed imaging of 1 MHz driven microbubbles in contact with a rigid wall

Solid State Phenomena

Volumn 145-146, Issue , 2009, Pages 7-10

  Zijlstra, Aaldert ^a   Janssens, Tom ^b   Wostyn, Kurt ^b   Versluis, Michel ^a   Mertens, Paul M ^b   Lohse, Detlef ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b IMEC   (Belgium)

Author keywords

Cavitation; Cleaning; Megasonic; Visualization

Indexed keywords

ACOUSTICS; CAVITATION; DISSOLUTION; NANOPARTICLES; PHOTOLITHOGRAPHY; REMOVAL; SEMICONDUCTOR DEVICE MANUFACTURE; SONOCHEMISTRY; VISUALIZATION;

ACOUSTIC CAVITATIONS; BUBBLE DYNAMICS; CAVITATION BUBBLE; CONCENTRATION OF; DISSOLVED GAS; HIGH FREQUENCY; HIGH SPEED IMAGING; MEGASONIC; MEGASONIC CLEANING; MEGASONICS; MICROBUBBLES; PARTICLE REMOVAL EFFICIENCY; PHYSICAL BEHAVIORS; PHYSICAL MECHANISM; PRESSURE BUILD UP; RIGID WALL; SEMICONDUCTOR INDUSTRY; SEMICONDUCTOR PROCESSING; SOLID WALL; SUB-MICROSECOND; TIME-SCALES; UNDERLYING MECHANISM;

CLEANING;

EID: 75849119057     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.145-146.7     Document Type: Conference Paper

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