New properties of halogen plasma-treated Cu films

International Journal of Materials Research

Volumn 100, Issue 6, 2009, Pages 826-829

  Pikulev, Vitaly ^a   Dictus, Dries ^b   Loginova, Svetlana ^a   Baklanov, Mikhail R ^b  

^a PETROZAVODSK STATE UNIVERSITY   (Russian Federation)

^b IMEC   (Belgium)

Author keywords

Copper chloride; Defects; Luminescence; Nanowires

Indexed keywords

ACCELERATED DEGRADATION; COPPER CHLORIDE; COPPER CHLORIDES; CU FILMS; HALOGEN PLASMAS; HELIUM PLASMAS; LIGHT ILLUMINATION; LUMINESCENCE PEAK; OZONE TREATMENT; PHOTOLUMINESCENCE SIGNALS; ROOM TEMPERATURE; SI SUBSTRATES; UV ILLUMINATIONS;

CHLORINE COMPOUNDS; COPPER; COPPER COMPOUNDS; DEFECTS; HELIUM; METALLIC FILMS; NANOWIRES; OZONE;

LUMINESCENCE;

EID: 75749157991     PISSN: 18625282     EISSN: None     Source Type: Journal    
DOI: 10.3139/146.110129     Document Type: Article

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