Recent progress in FSMA microactuator developments

Materials Science Forum

Volumn 635, Issue , 2010, Pages 145-154

  Kohl, M ^a   Reddy Y, Srinivasa ^a   Khelfaoui, F ^a   Krevet, B ^a   Backen, A ^b   Fahler S ^b   Eichhorn, T ^c   Jakob, G ^c   Mecklenburg, A ^d  

^a UNIVERSITY OF KARLSRUHE   (Germany)

^b IFW DRESDEN   (Germany)

^c JOHANNES GUTENBERG UNIVERSITY   (Germany)

^d HAHN MEITNER INSTITUT   (Germany)

Author keywords

Ferromagnetic shape memory alloys; Finite element simulation; Microactuators; Thermo mechanical training; Thin films

Indexed keywords

FERROMAGNETIC MATERIALS; FERROMAGNETISM; FILM THICKNESS; GALLIUM ALLOYS; MANGANESE ALLOYS; MECHANICAL ACTUATORS; MICROACTUATORS; SINGLE CRYSTALS; SUBSTRATES; TERNARY ALLOYS; THIN FILMS;

FABRICATION TECHNOLOGIES; FERROMAGNETIC SHAPE MEMORY; FERROMAGNETIC SHAPE MEMORY ALLOY; FINITE ELEMENT SIMULATIONS; INTEGRATION TECHNOLOGIES; PERFORMANCE CHARACTERISTICS; QUASI-TWO-DIMENSIONAL GEOMETRIES; THERMO-MECHANICAL TRAINING;

SHAPE-MEMORY ALLOY;

EID: 75649133937     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/MSF.635.145     Document Type: Conference Paper

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