A novel actuation mechanism on the basis of ferromagnetic SMA thin films

Sensors and Actuators, A: Physical

Volumn 114, Issue 2-3, 2004, Pages 445-450

  Kohl, M ^a   Brugger, D ^a   Ohtsuka, M ^b   Takagi, T ^b  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Microscanner; Ni2MnGa thin films; Shape memory actuator; Smart materials; Sputter deposition

Indexed keywords

FERROMAGNETIC MATERIALS; FREQUENCIES; GALLIUM COMPOUNDS; HEAT TRANSFER; INTELLIGENT MATERIALS; MAGNETIC FIELD EFFECTS; MANGANESE COMPOUNDS; MICROACTUATORS; NICKEL COMPOUNDS; RESONANCE; SCANNING; SHAPE MEMORY EFFECT; SPUTTER DEPOSITION;

BIASING ELEMENT; FERROMAGNMETIC TRANSITION; MICROSCANNER; MICROSYSTEMS;

THIN FILMS;

EID: 4344594910     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.11.006     Document Type: Article

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