Projection ablation lithography cathode for high-current, relativistic magnetron

Review of Scientific Instruments

Volumn 75, Issue 9, 2004, Pages 2976-2980

  Jones, M C ^a   Neculaes, V B ^a   Gilgenbach, R M ^a   White, W M ^a   Lopez, M R ^a   Lau, Y Y ^a   Spencer, J A ^b   Price, D ^c  

^a UNIVERSITY OF MICHIGAN   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

^c TITAN CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROWAVE OSCILLATION; MICROWAVE SIGNALS; PROJECTION ABLATION LITHOGRAPHY (PAL); RELATIVISTIC MAGNETRON;

ALUMINUM ALLOYS; CATHODES; ELECTRIC POTENTIAL; ELECTRON EMISSION; LASER ABLATION; LASER PULSES; LITHOGRAPHY; MICROWAVE GENERATION; MICROWAVES;

MAGNETRONS;

EID: 7544228873     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1784561     Document Type: Article

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