Effect of thin silicon dioxide layers on resonant frequency in infrared metamaterials

Optics Express

Volumn 18, Issue 2, 2010, Pages 1085-1090

  Shelton, D J ^a   Peters, D W ^b   Sinclair, M B ^b   Brener, I ^b   Warne, L K ^b   Basilio, L I ^b   Coffey, K R ^a   Boreman, G D ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; METALLIC COMPOUNDS; METAMATERIALS; NATURAL FREQUENCIES; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SUBSTRATES;

ACCURATE PREDICTION; BLUE SHIFT; DEGREE OF SENSITIVITY; FRINGING FIELDS; METALLIC ELEMENTS; NATIVE OXIDE LAYER; NUMERICAL SIMULATION; RESONANT FREQUENCIES; SEMICONDUCTOR SUBSTRATE; SERIES CAPACITANCE; SI WAFER; SILICON DIOXIDE; SILICON DIOXIDE LAYERS; SPLIT RING RESONATOR; SQUARE LOOP; VIBRATIONAL ABSORPTION;

SILICON WAFERS;

SILICON DIOXIDE;

ARTICLE; ARTIFICIAL MEMBRANE; CHEMISTRY; IMPEDANCE; INFRARED RADIATION; MATERIALS; RADIATION SCATTERING; SEMICONDUCTOR;

ELECTRIC IMPEDANCE; INFRARED RAYS; MANUFACTURED MATERIALS; MEMBRANES, ARTIFICIAL; SCATTERING, RADIATION; SEMICONDUCTORS; SILICON DIOXIDE;

EID: 75249098513     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.001085     Document Type: Article

References (17)

1. D. Shelton, J. Ginn, and G. Boreman, "Bandwidth variations in conformal infrared frequency selective surfaces," IEEE Antennas Propag. International Symposium, 3976 (2007)
2. D. H. Kwon, X. Wang, Z. Bayraktar, B. Weiner, and D. H. Werner, "Near-infrared metamaterial films with reconfigurable transmissive/ reflective properties," Opt. Lett. 33(6), 545-547 (2008).
3. B. Kanté, A. de Lustrac, and J. M. Lourtioz, "In-plane coupling and field enhancement in infrared metamaterial surfaces," Phys. Rev. B 80(3), 035108 (2009).
4. J. Ginn, D. Shelton, P. Krenz, B. Lail, and G. Boreman, "Altering infrared metamaterial performance through metal resonance damping," J. Appl. Phys. 105(7), 074304 (2009).
5. B. Monacelli, J. Pryor, B. A. Munk, D. Kotter, and G. Boreman, "Infrared frequency selective surface based on circuit-analog square loop design," IEEE Trans. Antenn. Propag. 53(2), 745-752 (2005).
6. J. F. O'Hara, E. Smirnova, H. T. Chen, A. J. Taylor, R. D. Averitt, C. Highstrete, M. Lee, and W. J. Padilla, "Properties of planar electric metamaterials for novel terahertz applications," J. Nanoelectron. Optoelectron. 2(1), 90-95 (2007).
7. N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, "Perfect metamaterial absorber," Phys. Rev. Lett. 100(20), 207402 (2008).
8. J. Ginn, B. Lail, J. Alda, and G. Boreman, "Planar infrared binary phase reflectarray," Opt. Lett. 33(8), 779-781 (2008).
9. J. Tharp, B. Lail, B. Munk, and G. Boreman, "Design and demonstration of an infrared meanderline phase retarder," IEEE Trans. Antenn. Propag. 55(11), 2983-2988 (2007).
10. E. Cubukcu, S. Zhang, Y. S. Park, G. Bartal, and X. Zhang, "Split ring resonator sensors for infrared detection of single molecular monolayers," Appl. Phys. Lett. 95(4), 043113 (2009).
11. B. Kante, A. de Lustrac, J. M. Lourtioz, and F. Gadot, "Engineering resonances in infrared metamaterials," Opt. Express 16(10), 6774-6784 (2008), http://www.opticsinfobase.org/abstract.cfm?URI=oe-16-10-6774.
12. W. J. Padilla, A. J. Taylor, C. Highstrete, M. Lee, and R. D. Averitt, "Dynamical electric and magnetic metamaterial response at terahertz frequencies," Phys. Rev. Lett. 96(10), 107401 (2006).
13. D. Li, Y. J. Xie, P. Wang, and R. Yang, "Applications of Split-ring resonances on multi-band frequency selective surfaces," J. Electromagn. Waves Appl. 21(11), 1551-1563 (2007).
14. H. Leplan, B. Geenen, J. Y. Robic, and Y. Pauleau, "Redidual stresses in evaporated silicon dioxide thin films: Correlation with deposition parameters and aging behavior," J. Appl. Phys. 78(2), 962 (1995).
15. N. M. Sushkova, and A. G. Akimov, "Formation of 3D islands of metal oxides on silicon covered by native oxide film by multi-step ion sputtering of Ti, Nb and V," Vacuum 56(4), 287-291 (2000).
16. D. J. Shelton, T. Sun, J. C. Ginn, K. R. Coffey, and G. D. Boreman, "Relaxation time effects on dynamic conductivity of alloyed metallic thin films in the infrared band," J. Appl. Phys. 104(10), 103514 (2008).
17. M. G. Moharam, and T. K. Gaylord, "Rigorous coupled-wave analysis of planar-grating diffraction," J. Opt. Soc. Am. 71(7), 811 (1981).