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Volumn 25, Issue 4, 2009, Pages 93-99
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Modeling and characterization of ALD grown ZnO nanotubes and their application to sub-micron devices
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTROMECHANICAL DEVICES;
FREQUENCY RESPONSE;
II-VI SEMICONDUCTORS;
MEMS;
NANOWIRES;
OXIDE MINERALS;
ZINC OXIDE;
CHARACTERISTIC PROPERTIES;
FIXED-FIXED BEAMS;
MICRO ELECTROMECHANICAL SYSTEM (MEMS);
PERCENTAGE ERROR;
PIEZOELECTRIC ACTUATION;
SUBMICRON DEVICES;
TEMPLATE TECHNOLOGY;
THEORETICAL MODELING;
ATOMIC LAYER DEPOSITION;
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EID: 74249118193
PISSN: 19385862
EISSN: 19386737
Source Type: Conference Proceeding
DOI: 10.1149/1.3205046 Document Type: Conference Paper |
Times cited : (3)
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References (14)
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