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Volumn 11, Issue 12, 2009, Pages 969-975
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Multifunctional FeCo/TiN multilayer thin films with combined magnetic and protective properties
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Author keywords
[No Author keywords available]
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Indexed keywords
BILAYER PERIOD;
EX SITU;
FERROMAGNETIC PHASE;
FERROMAGNETIC PROPERTIES;
FREQUENCY-DEPENDENT;
INTEGRATED SENSORS;
LAYER THICKNESS RATIO;
MAGNETO-ELASTIC;
MODEL SYSTEM;
MULTI-LAYER THIN FILM;
MULTI-LAYER-COATING;
NON-CONTACT;
ONLINE MONITORING;
OPTICAL INSPECTION;
PROTECTIVE PROPERTIES;
READOUT ELECTRONICS;
SENSOR APPLICATIONS;
SENSOR FUNCTION;
STATIC MAGNETIC FIELDS;
TOOL LIFETIME;
VOLUME LOSS;
WEAR RESISTANCE COATINGS;
WEAR-RESISTANT COATING;
YOUNG'S MODULUS;
COATINGS;
FERROMAGNETIC MATERIALS;
FERROMAGNETISM;
FILM PREPARATION;
MAGNETIC FIELDS;
MAGNETIC PROPERTIES;
MAGNETRONS;
MECHANICAL PERMEABILITY;
MECHANICAL PROPERTIES;
MULTILAYER FILMS;
MULTILAYERS;
OPTICAL TESTING;
PHYSICAL VAPOR DEPOSITION;
SENSORS;
TITANIUM NITRIDE;
WEAR RESISTANCE;
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EID: 73849120791
PISSN: 14381656
EISSN: 15272648
Source Type: Journal
DOI: 10.1002/adem.200900214 Document Type: Article |
Times cited : (13)
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References (16)
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