Design and fabrication of novel compliant electrostatically actuated microvalves

Advanced Materials Research

Volumn 74, Issue , 2009, Pages 179-182

  Zhang, Qing ^a   Pekas, Nikola ^a   Juncker, David ^a  

^a MCGILL UNIVERSITY   (Canada)

Author keywords

Elastomeric membrane; Electrostatic actuation; Microvalve; PDMS

Indexed keywords

ACTUATION VOLTAGES; ADHESIVE LAYERS; DC VOLTAGE; ELASTOMERIC MEMBRANES; ELECTRICAL SIGNAL; ELECTROSTATIC ACTUATION; FABRICATION PROCESS; FLEXIBLE ELECTRODES; FLEXIBLE MEMBRANES; FULLY INTEGRATED; GAS CHANNELS; GAS FLOW CONTROL; GLASS SUBSTRATES; HETEROGENEOUS MATERIALS; LARGE SCALE INTEGRATION; LOW COST FABRICATION; LOW-POWER CONSUMPTION; MECHANICAL RESPONSE; MICRO VALVES; MICRO-FABRICATION TECHNIQUES; MICROFLUIDIC CIRCUIT; MULTI-LAYERED; NET PRESSURE; ON CHIPS; PARALLEL PLATES; POLYMERIC MATERIAL; PRACTICAL SOLUTIONS; REDUCED POWER CONSUMPTION; REPLICA MOLDING; THIN ELASTIC MEMBRANE;

DAMPING; DIES; ELECTRODES; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; GASES; MICROANALYSIS; MICROCHANNELS; MICROFABRICATION; MICROFLUIDICS; MICROMACHINING; POLYMERIC GLASS; PUMPS; SILICONES;

VALVES (MECHANICAL);

EID: 73549098930     PISSN: 10226680     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/AMR.74.179     Document Type: Conference Paper

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