Vapor phase surface functionalization under ultra violet activation of parylene thin films grown by chemical vapor deposition

Thin Solid Films

Volumn 518, Issue 6, 2010, Pages 1675-1681

  Santucci, Virginie ^a   Maury, Francis ^a   Senocq, François ^a  

^a CNRS   (France)

Author keywords

Aging; Optical coatings; Parylene films; Surface composition; Surface functionalization; UV irradiation

Indexed keywords

AMBIENT AIR; DIFFERENT SUBSTRATES; DRY PROCESS; FUNCTIONALIZATIONS; LONG LIFE STABILITY; PARYLENE C; PARYLENE FILM; PARYLENES; POLYMER SURFACES; REACTIVE ATMOSPHERES; REACTIVE GAS; SURFACE COMPOSITIONS; SURFACE FUNCTIONALIZATION; ULTRA VIOLET; UV IRRADIATION; VAPOR PHASE; VISIBLE RANGE; VISIBLE WAVELENGTHS; WATER CONTACT ANGLE;

CHEMICAL VAPOR DEPOSITION; CONTACT ANGLE; DEPOSITION; IRRADIATION; OPTICAL COATINGS; OPTICAL PROPERTIES; SURFACE STRUCTURE;

OPTICAL FILMS;

EID: 73449107172     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.11.064     Document Type: Article

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