The effects of hydrogen dilution on structure of Si:H thin films deposited by PECVD

Journal of Physics: Conference Series

Volumn 187, Issue , 2009, Pages

  Trung, Tran Quang ^a   Jiri, Stuchlik ^b   Stuchlikova, Ha ^b   Binh, Le Khac ^a   Dinh, Nguyen Nang ^c   Khuong, Huynh Kim ^a   Quynh, Phan Thi Nhu ^a   Nga, Nguyen Thi Huynh ^a  

^a UNIVERSITY OF NATURAL SCIENCES   (Viet Nam)

^b INSTITUTE OF PHYSICS   (Czech Republic)

^c VIETNAM NATIONAL UNIVERSITY   (Viet Nam)

Author keywords

A Si:H; Hydrogen dilution; Nc c Si:H; Para crystallines; Plasma enhanced chemical vapor deposition

Indexed keywords

EID: 73349134049     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/187/1/012035     Document Type: Conference Paper

References (11)

1. Brodsky M H, Cardona M, Cuomo J J 1977 Phys. Rev. B 16 (8) 3556
2. Mahan A H, Yang J, Cuba S, Wiliamson D L 2000 Phys. Rev. B 61 (3) 1667
3. Kroll U, Meier J, Shah A, Mikhailov S, Weber J 1996 J. Appl. Phys. 80 (9) 4971
4. Tolstoy V P, Chenyshova I V, Skryshevsky V A 2003 Handbook of infrared spectroscopy of ultra thin films section 5.5
5. Lucovsky G, Pollard W B 1984 The Physics of Hydrogenated Silicon II (Springer-Velag P)
6. Debajyoti Das 1997 Bull. Mater. Sci. 20 (1) 9
7. Thorsten Dylla 2004 Electron Spin Resonance and Transient Photocurrent Measurements on Microcrystalline Silicon Doctoral Thesis (Free University of Berlin)
8. Voyles P M, Zotov N, Nakhmansonc S M, Drabold D A, Gibson J M, Treacy M M J, Keblinski P 2001 J. Appl. Phys. 90 (9) 4437
9. Trung T Q, Jiri S et al 2008 Proc. 1st IWNA 2008 (Vietnam)
10. Mishra P, Jain K P 2002 Mater. Sci. Eng. B 95 202
11. Gupta N D, Chaudhuri P 2001 J. Non. Cryst. Sol. 289 168