Composition design and properties of CoNbZr amorphous films deposited by unbalanced magnetron sputtering

Journal of Central South University of Technology (English Edition)

Volumn 16, Issue 5, 2009, Pages 719-724

  Guo, Guang Wei ^a,b   Tang, Guang Ze ^a   Wang, Ya Jun ^a   Ma, Xin Xin ^a   Wang, Yu Jiang ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b NORTHEAST PETROLEUM UNIVERSITY   (China)

Author keywords

CoNbZr amorphous film; Isothermal annealing; Magnetron co sputtering

Indexed keywords

AFM; COERCIVITIES; COMPOSITION DESIGN; CONBZR AMORPHOUS FILM; COSPUTTERING; CRYSTALLIZED FILMS; GLASS SUBSTRATES; MAGNETRON CO-SPUTTERING; MEAN-GRAIN SIZE; MORPHOLOGY AND COMPOSITION; SEM; THERMAL STABILITY; UNBALANCED MAGNETRON SPUTTERING; XRD;

COBALT; INORGANIC COATINGS; ISOTHERMAL ANNEALING; MAGNETIC PROPERTIES; MAGNETRONS; SECONDARY BATTERIES; THERMODYNAMIC STABILITY; ZIRCONIUM;

AMORPHOUS FILMS;

EID: 73349085904     PISSN: 10059784     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11771-009-0119-y     Document Type: Article

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