Modeling and performance of uncoated microcantilever-based chemical sensors

Sensors and Actuators, B: Chemical

Volumn 143, Issue 2, 2010, Pages 555-560

  Tétin, Sébastien ^a   Caillard, Benjamin ^a   Ménil, Francis ^a   Debéda, Hélène ^a   Lucat, Claude ^a   Pellet, Claude ^a   Dufour, Isabelle ^a  

^a UNIVERSITÉ DE BORDEAUX   (France)

Author keywords

Binary mixture; Chemical detection; Gas mass density; Gas viscosity; Resonant microcantilever

Indexed keywords

BINARY MIXTURES; CHEMICAL DETECTION; COMPOSITE MICROMECHANICS; DENSITY OF GASES; GAS MIXTURES; GASES; NATURAL FREQUENCIES;

BINARY GAS MIXTURE; GAS MASS; GAS VISCOSITY; MICRO-CANTILEVERS; RESONANT MICRO CANTILEVERS; SENSITIVE COATINGS; SILICON MICROCANTILEVERS; THEORETICAL MODELING;

CHEMICAL SENSORS;

EID: 73149101847     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.09.062     Document Type: Article

References (13)

1. Sepaniak M., Datskos P., Lavrik N., and Tipple C. Microcantilever transducers: a new approach in sensor technology. Analytical Chemistry 74 21 (2002) 568A-575A (A-Pages)
2. Goeders K.M., Colton J.S., and Bottomley L.A. Microcantilevers: sensing chemical interactions via mechanical motion. Chemical Reviews 108 (2008) 522-542
3. Blom F.R., Bouwstra S., Elwenspoek M., and Fluitman J.H.J. Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry. Journal of Vacuum Science and Technology B 10 1 (1992) 19-26
4. Hosaka H., Itao K., and Kuroda S. Damping characteristics of beam-shaped micro-oscillators. Sensors and Actuators A 49 (1995) 87-95
5. Sader E. Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope. Journal of Applied Physics 84 (1998) 64-76
6. Blevins R.D. Formulas for Natural Frequency and Mode Shape (1979), Van Nostrand Reinhold Company
7. Yasumura K.Y., Stowe T.D., Chow E.M., Pfafman T., Kenny T.W., Stipe B.C., and Rugar D. Quality factors in micron- and submicron-thick cantilevers. Journal of Microelectromechanical Systems 9 (2000) 117-125
8. Lochon F., Dufour I., and Rebière D. A microcantilever chemical sensors optimization by taking into account losses. Sensors and Actuators B 118 (2006) 292-296
9. Maali A., Hurth C., Boisgard R., Jai C., Cohen-Bouhacina T., and Aimé J.P. Hydrodynamics of oscillating atomic force microscopy cantilevers in viscous fluids. Journal of Applied Physics 97 (2005) 074907
10. Boskovic S., Chon J.W.M., Mulvaney P., and Sader J.E. Rheological measurements using microcantilevers. Journal of Rheology 46 (2002) 891-899
11. Sutherland W. The viscosity of mixed gases. Philosophical Magazine and Journal of Science 40 (1895) 421-431
12. Wilke C.R. A viscosity equation for gas mixtures. Journal of Chemical Physics 18 (1950) 517-518
13. Brokaw P.S. Predicting transport properties of dilute gases. Industrial Engineering Chemistry Process Design and Development 8 (1968) 240-253