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Volumn 41, Issue 13-14, 2001, Pages 2123-2137
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Proposal for a guideline to calibrate interference microscopes for use in roughness measurements
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Author keywords
[No Author keywords available]
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Indexed keywords
CALIBRATION;
CORRELATION METHODS;
IMAGING SYSTEMS;
INTERFEROMETRY;
OPTICAL MICROSCOPY;
SENSITIVITY ANALYSIS;
SPURIOUS SIGNAL NOISE;
STANDARDS;
SURFACE ROUGHNESS;
INTERFERENCE MICROSCOPES;
ROUGHNESS MEASUREMENT;
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EID: 0035479516
PISSN: 08906955
EISSN: None
Source Type: Journal
DOI: 10.1016/S0890-6955(01)00079-7 Document Type: Article |
Times cited : (9)
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References (14)
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