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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 27, Issue 3, 2009, Pages 1057-1059

Isolation of organic field-effect transistors by surface patterning with an UV/ozone process

(4) Kim, Sung Jin a Beveridge, Henry a Koberstein, Jeffrey T a Kymissis, Ioannis a

a Department of Earth and Environmental Sciences (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FIELD EFFECT TRANSISTORS; MICROCHANNELS; SILICON; SILICON COMPOUNDS; SILICON OXIDES;

ACTIVE DEVICES; CHANNEL CONDUCTIVITY; PATTERNING TECHNIQUES; PENTACENE FILM; PENTACENE THIN FILMS; PHOTO PATTERNING; PHOTO-INDUCED; POLYDIMETHYLSILOXANE PDMS; SELECTIVE GROWTH; SURFACE PATTERNING; UV/OZONE;

ORGANIC FIELD EFFECT TRANSISTORS;

EID: 73049092207 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3117350 Document Type: Conference Paper

Times cited : (3)

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