Broadband microwave dielectric properties of BST thin films on quartz substrates

Ferroelectrics

Volumn 356, Issue 1 PART 2, 2007, Pages 158-165

  Saravanan, K Venkata ^a   Sudheendran, K ^a   Krishna, M Ghanashyam ^a   Raju, K C James ^a  

^a UNIVERSITY OF HYDERABAD   (India)

Author keywords

BST; Ferroelectric thin films; Microwave permittivity

Indexed keywords

AS-DEPOSITED FILMS; ATOMIC FORCE MICROSCOPES; BST FILM; BST THIN FILMS; COMPARISON TECHNIQUES; CPW TRANSMISSION LINE; DIELECTRIC CONSTANTS; FREQUENCY DEPENDENT PERMITTIVITY; LOSS TANGENT; MICROWAVE DIELECTRIC PROPERTIES; MICROWAVE PERMITTIVITY; POST DEPOSITION ANNEALING; PROBE STATIONS; PROCESSING CONDITION; QUARTZ SUBSTRATE; RF-MAGNETRON SPUTTERING; SHADOW MASK; SPUTTERING ATMOSPHERE; SPUTTERING GAS; STRUCTURAL DEFECT; TEST STRUCTURE; TIO; TRANSMISSION LINE; VECTOR NETWORK ANALYZERS; X-RAY AMORPHOUS;

AMORPHOUS FILMS; BARIUM; COPLANAR WAVEGUIDES; DIELECTRIC LOSSES; ELECTRIC LINES; ELECTRIC NETWORK ANALYSIS; ELECTRIC NETWORK ANALYZERS; FERROELECTRIC FILMS; FERROELECTRIC THIN FILMS; FERROELECTRICITY; MAGNETRON SPUTTERING; MICROWAVES; OXIDE MINERALS; OXYGEN; PERMITTIVITY; PROBES; QUARTZ; SCATTERING PARAMETERS; SUBSTRATES; TRANSMISSION LINE THEORY;

SILVER;

EID: 72449167746     PISSN: 00150193     EISSN: 15635112     Source Type: Journal    
DOI: 10.1080/00150190701511880     Document Type: Conference Paper

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