Planar wafer transport and positioning on an air film using a viscous traction principle

Tribology International

Volumn 42, Issue 11-12, 2009, Pages 1542-1549

  van Rij, J ^a   Wesselingh, J ^a   van Ostayen, R A J ^a   Spronck, J W ^a   Munnig Schmidt, R H ^a   van Eijk, J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Fluid mechanics; Gas lubricated bearing; Viscous traction

Indexed keywords

ACTUATOR GEOMETRY; AIR FILMS; AIR FLOW; ANALYTICAL MODEL; COMPUTATIONAL RESULTS; CONTACT LESS; FLAT PRODUCTS; INCOMPRESSIBLE NAVIER STOKES EQUATIONS; MAXIMUM ACCELERATION; NUMERICAL MODELING; OPERATING PRINCIPLES; PRESSURE-DRIVEN; PRODUCT SURFACE; TRANSPORT SYSTEMS; VERTICAL BEARING; WAFER TRANSPORT;

ACTUATORS; COMPUTER SIMULATION; CONTACTS (FLUID MECHANICS); FLUID MECHANICS; GAS LUBRICATED BEARINGS; INDUSTRIAL APPLICATIONS; LUBRICATION; MODELS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; TRACTION (FRICTION);

NAVIER STOKES EQUATIONS;

EID: 72149132011     PISSN: 0301679X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.triboint.2009.03.013     Document Type: Article

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