Actuator for contactless transport and positioning of large flat substrates

Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008

Volumn 1, Issue , 2008, Pages 145-149

  Wesselingh, J ^a   Van Ostayen, R A J ^a   Spronck, J W ^a   Schmidt, R H Munnig ^a   Van Eijk, J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; GLASS; PRECISION ENGINEERING; PRINTED CIRCUIT BOARDS; SILICON WAFERS;

AIR ACTUATORS; CONTACT LESS; GLASS PLATE; LARGE FLATS; LATERAL DIRECTIONS; MECHANICAL CONTACT; THIN AIR FILM; VERTICAL STIFFNESS;

SUBSTRATES;

EID: 84862102905     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. White, F. M., Fluid Mechanics, 4th edition. McGraw-Hill
2. Gross, W. A., Gas Film Lubrication, Jon Wiley and Sons, 1962