Capacitively coupled RF discharge breakdown in gas mixtures

IEEJ Transactions on Fundamentals and Materials

Volumn 127, Issue 11, 2007, Pages

  Sasaki, Norihiko ^a   Shoji, Masafumi ^b   Uchida, Yutaka ^c  

^a SENDAI NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^b Wacom R and D CO

^c TOSHIBA CORPORATION   (Japan)

Author keywords

Breakdown; Gas mixtures; Penning ionization; RF discharge

Indexed keywords

ELECTRIC BREAKDOWN OF GASES; ELECTRON ENERGY LEVELS; GAS MIXTURES; IONIZATION OF GASES; MIXING; PARTIAL DISCHARGES;

BREAKDOWN; CAPACITIVELY COUPLED; CAPACITIVELY COUPLED RF DISCHARGE; ELECTRODE SEPARATION; IONIZATION PROCESS; PENNING IONIZATION; RF DISCHARGE; VIBRATIONAL EXCITATION;

GASES;

EID: 72149122097     PISSN: 03854205     EISSN: 13475533     Source Type: Journal    
DOI: 10.1541/ieejfms.127.714     Document Type: Conference Paper

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