Breakdown measurement of a capacitive radio frequency discharge with insulated electrode

Applied Physics Letters

Volumn 71, Issue 23, 1997, Pages 3362-3363

  Shoji, Masafumi ^a   Sato, Masumi ^a  

^a YAMAGATA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343394435     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120337     Document Type: Article

References (9)

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