An electrothermally actuated bi-axis scanning micromirror for medical imaging applications

2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Volumn , Issue , 2009, Pages 53-54

  Izhar, U ^a   Ooi, B S ^a   Tatic Lucic, S ^a  

^a Lehigh University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFLECTION ANGLES; INPUT POWER; MICRO MIRROR; SCANNING MICROMIRROR;

MEDICAL IMAGING; MEMS; MICROELECTROMECHANICAL DEVICES; NANOPHOTONICS;

PHOTONICS;

EID: 71849115416     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2009.5338599     Document Type: Conference Paper

References (4)

1. J. Singh, J.H.S. Teo, Y. Xu, C.S. Premchandran, N. Chen, J. Micromech. Microeng., 18 (2008) p. 1-9
2. S. T. Todd, A. Jain, H. Qu, H. Xie, "A multi degree of freedom micromirror utilizing inverted series-connected bimorph actuators", J. of Optics A: Pure and Applied Optics 8 (2006), p. S352-S359
3. U. Izhar, B.S. Ooi, S.Tatic-Lucic, "Multi-axis micromirror for optical coherence tomography", Eurosensors XXIII (2009), Lausanne, Switzerland (Submitted)
4. J. Jiang, U. Hilleringmann, X. Shui, Sensors and Actuators A, 137 (2007) p. 302-307