Possibility of BaTiO3 thin films prepared on Cu substrates for embedded decoupling capacitors by an aerosol deposition method

Journal of Ceramic Processing Research

Volumn 10, Issue 5, 2009, Pages 674-678

  Oh, Jong Min ^a   Nam, Song Min ^a  

^a Kwangwoon University   (South Korea)

Author keywords

Aerosol deposition method; BaTiO3; Crater; Embedded decoupling capacitor; Leakage current density; Pores; Thin film

Indexed keywords

EID: 71849091972     PISSN: 12299162     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

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