Fabrication by electrostatic spray deposition and structural investigation of ultra thin and dense zirconia films

Thin Solid Films

Volumn 517, Issue 24, 2009, Pages 6784-6788

  Lintanf Salaun A ^a,b   Djurado, E ^a  

^a LEPMI   (France)

^b UNIV GRENOBLE ALPES   (France)

Author keywords

Electrospraying; Field emission scanning electron microscopy; Grazing incidence x ray diffraction; Raman microspectroscopy; Thin films; Transmission electron microscopy; Zirconia

Indexed keywords

A-THERMAL; AS-DEPOSITED FILMS; CARBITOL; ELECTROSPRAYING; ELECTROSTATIC SPRAY DEPOSITION; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; GRAZING INCIDENCE X-RAY DIFFRACTION; MICRO-ELECTRONIC DEVICES; MONOCLINIC PHASE; PARTIAL CRYSTALLIZATION; PRECURSOR SOLUTIONS; RAMAN MICROSPECTROSCOPY; SALT CONCENTRATION; SCANNING AND TRANSMISSION ELECTRON MICROSCOPY; SOLVENT COMPOSITION; STRUCTURAL INVESTIGATION; ULTRA-THIN; ZIRCONIA FILM; ZIRCONIUM ACETYLACETONATE;

DEPOSITS; DIFFRACTION; ELECTRON EMISSION; ELECTRONS; ELECTROSTATIC DEVICES; ELECTROSTATICS; ETHANOL; FIELD EMISSION; FIELD EMISSION MICROSCOPES; HEAT TREATMENT; HELIUM; MICROELECTRONICS; MICROOPTICS; ORGANIC SOLVENTS; SCANNING; SCANNING ELECTRON MICROSCOPY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; ZIRCONIA; ZIRCONIUM;

AMORPHOUS FILMS;

EID: 71749104491     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.05.047     Document Type: Article

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