Development of X-ray microcalorimeters based on SOI technology and experimental results

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 610, Issue 1, 2009, Pages 345-347

  Szeflinski, V ^a   Aliane, A ^b   De Moro, F ^b   Pigot, C ^a   Sauvageot, J L ^a   Agnese P ^b   Gasse, A ^b   Ribot, H ^b   Gremion, E ^a   De La Broise, X ^a   Navick, X F ^a  

^a CEA SACLAY   (France)

^b CEA GRENOBLE   (France)

Author keywords

Bolometer; Ion implantation; Microcalorimeter; Silicon technology; X ray detector

Indexed keywords

BOLOMETERS; CALORIMETERS; INDIUM; ION IMPLANTATION; X RAYS;

CRYOGENIC TEMPERATURES; DIFFUSED SILICON; MICRO-CALORIMETERS; MICROCALORIMETER; SILICON TECHNOLOGIES; SPACE GENERATION; THERMAL CAPACITANCE; THERMO-MECHANICAL;

X RAY DETECTORS;

EID: 71749095360     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2009.05.151     Document Type: Article

References (4)

1. See 〈http://astro.esa.int/SA-general/projects/XEUS〉.
2. F. De Moro, et al., Collective hybridization of tantalum absorbers on a silicon thermistors array for X-ray spectro-imaging devices, ECTC Conference, September 2008, pp. 651-656.
3. Aliane A., Agnese P., Pigot C., Sauvageot J.-L., de Moro F., Ribot H., Gasse A., Szeflinski V., and Gobil Y. NIMA 151 1-2 (2008)
4. Aliane A., et al. Proc. SPIE 7011 (2008) 701125