The development of X-ray bolometers based on SOI technology for astronomy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7011, Issue , 2008, Pages

  Aliane, A ^a   De Moro, F ^a   Agnese, P ^a   Pigot, C ^a   Sauvageot, J L ^a   Szeflinski, V ^a   Gasse, A ^a   Arnaud, M ^a   De La Broise X ^a   Navick, X F ^a   Routin, J ^a   Mathieu, L ^a   Cigna, J C ^a   Berger, F ^a   Ribot, H ^a   Gobil, Y ^a  

^a CEA LETI   (France)

Author keywords

Ion implantation; Micro technology; Micro calorimeter; SOI; X ray

Indexed keywords

ARRAY DETECTORS; BOLOMETER ARRAY; BUILDING ELEMENT; COLLECTIVE PROCESS; DETECTOR ARRAYS; DEVELOPMENT PROGRAMS; FABRICATION PROCESS; FRENCH ATOMIC ENERGY COMMISSIONS; GRENOBLE; HYBRIDIZATION PROCESS; IMAGING CAMERA; INDIUM BUMPS; INFRA RED; MICRO TECHNOLOGY; MICRO-CALORIMETER; MICRO-CALORIMETER ARRAY; MICRO-CALORIMETERS; SI BULK MICROMACHINING; SILICON ON INSULATOR; SILICON TECHNOLOGIES; SOI; SOI TECHNOLOGY; SPACE ASTRONOMY; SPACE MISSIONS; X-RAY BOLOMETER;

ASTRONOMICAL SATELLITES; ASTROPHYSICS; BOLOMETERS; CALORIMETERS; CALORIMETRY; DETECTORS; ELECTROMAGNETIC WAVES; INFRARED DETECTORS; OPTICAL INSTRUMENTS; OPTICAL TELESCOPES; PIXELS; PLASMA DEPOSITION; PLASMA ETCHING; PUMPS; SILICON ON INSULATOR TECHNOLOGY; SPACE TELESCOPES; SPACECRAFT OBSERVATORIES; TANTALUM; TECHNOLOGY; TEMPERATURE MEASURING INSTRUMENTS; THERMISTORS; X RAY CAMERAS;

GAMMA RAYS;

EID: 70249090808     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.784809     Document Type: Conference Paper

References (10)

1. See http://astro.esa.int/SA-general/projects/XEUS.
2. A. Aliane, P. Agnese, C. Pigot, J-L. Sauvageot, F. de Moro, H. Ribot, A. Gasse, V. Szeflinski, Y. Gobil; "Design and fabrication process of silicon micro-calorimeters on simple SOI technology for X-ray spectroimagery", Nuclear Inst. and Methods in Physics Research, A., 2008
3. de Moro et al. "Development of the low temperature X-ray micro-calorimeter array for X-ray spectroimaging in view of the XEUS mission', EXRS 2008 proceedings, special issue of X-ray Spectrometry (Wiley Intescience)
4. C. K. Stahle and al «The next generation of silicon based X-ray micro-calorimeters» proceedings of SPIE vol. 4851 (2003).
5. S. J. Moseley, C. A. Allen, N. Costin, R. Kelley, C. Kilbourne, T. Miller, «Automated Hybridization of X-ray Absorber Elements-A Path to Large Format Microcalorimeter Arrays», JLTP 2008, Vol 151, p418-423
6. F. De Moro and al «Collective Hybridization of Tantalum Absorbers on a Silicon Thermistors Array for X-ray Spectro Imaging Devices» will be published in ECTC conference September, 2008.
7. V. Szeflinski et al., Submitted to 5th International Conference on New Developments In Photodetection proceedings, 2008
8. R. L. Kelley and al "The Suzaku High Resolution X-ray Spectrometer" Astronomical Society of Japan, Vol. 59, No. SP1, pp. 77-112, 2007.
9. J. Zhang et al, Phys. Rev. B 48, 2312 (1993).
10. B. I. Shklovskii and A. L. Efros, Electronic Properties of Doped Semiconductors Springer, Berlin (1984).